CAS: 999-97-3 Molecular Formula: C6H19NSi2 Molecular Weight (g/mol): 161.395 InChI Key: FFUAGWLWBBFQJT-UHFFFAOYSA-N Synonym: hexamethyldisilazane,bis trimethylsilyl amine,hmds,1,1,1,3,3,3-hexamethyldisilazane,hexamethylsilazane,silanamine, 1,1,1-trimethyl-n-trimethylsilyl,tri-sil,1,1,1-trimethyl-n-trimethylsilyl silanamine,hexamethyldisilizane,disilazane, 1,1,1,3,3,3-hexamethyl PubChem CID: 13838 ChEBI: CHEBI:85068 IUPAC Name: [dimethyl-(trimethylsilylamino)silyl]methane SMILES: C[Si](C)(C)N[Si](C)(C)C